#

Test

Abr.

Refer to
MIL-STD 883
JEDEC-STD-22

Conditions
Requirements

Duration

Sample Size per Lot (1)

Numberof Lots

Accepton
# fails

Comment

1

High Temperature

Operating Life

Electrical Distribution

HTOL

ED

M1005

JA108

AEC-Q100-009

150°C;

or 125°C

VDDmax; signal

1000 h

1000h;2000h

77

1

0

LT,RT,HT

2

E²PROM Data
Endurance/

Retention Test 7)

ET

AECQ100-005

-

-

77

1

0

RT,HT

3

Hot carrier test

HC

JESD 28

Vds>Vdsmax

acc. to Spec

@ 27°C

-

Wafer

1

-

-

4

Gate oxide test

GOX

JESD35

gate oxide capacity

@ 27°C

-

Wafer

1

-

-

5

Electromigration

test ( fast)

SWEAT

JEP119

@ 280..380°C

4..10 MA/cm²

200...1000s

Wafer

1

-

metal lines with critical dimensions